University of California, Riverside

Department of Mechanical Engineering

Masaru Rao

Faculty Profile

Faculty Profile

Masaru Rao

Assistant Professor of Mechanical Engineering
Masaru Rao

Ph.D. Material Engineering
University of California, Santa Barbara, 2001

Bourns Hall A313
University of California, Riverside
Riverside, CA 92521

Telephone: 951-827-5870
Facsimile: 951-827-5696
Personal Webpage

Dr. Masaru Rao received his B.S. in Material Science and Engineering from the University of Florida and his Ph.D. in Materials Engineering from the University of California, Santa Barbara. He is a member of ASME, IEEE Electron Devices and Engineering in Medicine & Biology Societies, and MRS.

Research Topics

Dr. Rao's research interests lie in the development and application of novel micro/nanofabrication methods and materials for MEMS, microfluidics, and biomedical microdevices.


  • Regents’ Faculty Fellowship Award, UC Riverside (2011)

Memberships and Affiliations

  • Core Faculty Member, BCOE Materials Science & Engineering Program
  • Participating Faculty Member, Department of Bioengineering
  • Member, ASME MEMS Division
  • Member, IEEE Electron Devices Society
  • Member, IEEE Engineering in Medicine & Biology Society
  • Member, Material Research Society

Research Areas

  • Novel micro/nanofabrication methods & materials
  • Biomedical microdevices

Selected Publications

  • PT McCarthy, MP Rao, and KJ Otto. Simultaneous recording of rat auditory cortex and thalamus via a titanium-based, microfabricated, multi-nucleus, microelectrode device. J Neural Engr 8(4):046007 (9pp), 2011.
  • PT McCarthy, KJ Otto, and MP Rao. Robust penetrating microelectrodes for neural interfaces realized by titanium micromachining. Biomed Microdevices 13(3):503-515, 2011.
  • YT Zhang, F Bottausci, MP Rao, ER Parker, I Mezic, and NC MacDonald. Titanium-based dielectrophoresis devices for microfluidic applications. Biomed Microdevices 10(4):509-517, 2008.
  • J Lu, MP Rao, NC MacDonald, D Khang, and TJ Webster. Improved endothelial cell adhesion and proliferation on patterned titanium surfaces with rationally designed, micrometer to nanometer features. Acta Biomater 4(1):192-201, 2008.
  • ER Parker, MP Rao, KL Turner, CD Mienhart, and NC MacDonald. Bulk micromachined titanium microneedles. J Microelectromech S 16(2):289-95, 2007.
  • ER Parker, MF Aimi, BJ Thibeault, MP Rao, and NC MacDonald. Inductively coupled plasma etching of bulk titanium for MEMS applications. J Electrochem Soc 152(10):C675-83, 2005.
  • MP Rao, MF Aimi, and NC MacDonald. Single-mask, three-dimensional microfabrication of high-aspect-ratio structures in bulk silicon using reactive ion etching lag and sacrificial oxidation. Appl Phys Lett 85(25):6281-83, 2004. Selected for cover image. Also published in Virtual Journal of Nanoscale Science & Technology, Dec. 27th, 2004.
  • MF Aimi, MP Rao, NC MacDonald, AS Zuruzi, and DP Bothman. High-aspect-ratio bulk micromachining of titanium. Nature Materials 3(2):103-05, 2004.
  • MP Rao, AJ Sanchez-Herencia, GE Beltz, RM McMeeking, and FF Lange. Laminar ceramics that exhibit a threshold strength. Science 286(5437):102-05, 1999.

More Information 

General Campus Information

University of California, Riverside
900 University Ave.
Riverside, CA 92521
Tel: (951) 827-1012

College Information

Bourns College of Engineering
446 Winston Chung Hall

Tel: (951) 827-5190
Fax: (951) 827-3188